Tribological investigation of multilayer CrN/CrCN/TaN films deposited by close field unbalanced magnettron sputtering

BAHÇE E. , Cakir N.

REVIEWS ON ADVANCED MATERIALS SCIENCE, cilt.58, ss.271-279, 2019 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 58 Konu: 1
  • Basım Tarihi: 2019
  • Doi Numarası: 10.1515/rams-2019-0036
  • Sayfa Sayıları: ss.271-279


CrN/CrCN/TaN multilayer films were deposited onto the CoCrMo alloy substrates at different number layers as two, four and 8 layers by close-field unbalanced magnetron sputtering method. Microstructure and the tribological properties of the films were characterized by XRD, SEM, pin-on-disk wear test, scratch test, micro hardness. CrN/CrCN/TaN multilayer coatings exhibited good adhesion properties on the CoCrMo alloy substrate. A very high hardness value of 60 GPa was obtained for 8 multilayered coating. As a result of the pin-on-disc wear tests, it was found that the tribological properties of the CoCrMo alloy were enhanced by coating its surface with this architecture by using close-field unbalanced magnetron system with used parameters.