In this paper, novel fluorinated silane compound was prepared by adding hydroxyl terminated Fluorolink D10H oligomer to 3-(triethoxysilyl)propylsuccinicanhydride. The obtained silane system was independently composed with 3-Aminopropyltrimethoxysilane, 3-Glycidyloxypropyltrimethoxysilane and 3-Glycidyloxypropyltriethoxysilane and, then the prepared coating solutions were applied to glass surface by spin-coating method. The chemical bonding between groups in system was investigated by Fourier Transform Infrared Spectroscopy analyses. The elemental composition of coatings was determined using Energy Dispersive X-ray Spectroscopy analyses. Its structure and surface properties were analyzed by scanning electron microscopy, atomic force microscopy, contact angle measurement and Ultraviolet-visible Absorption Spectroscopy. The amounts of fluorine on the coatings prepared with GF20-D10H-AMMO, GF20-D10H-GLYEO and GF20-D10H-GLYMO are 31, 32 and 34% at, respectively. Transparent coatings with smooth surface and uniform thickness were observed. The coatings had nanoscale roughness. The contact angles of coatings for water ranged from 88 to 107(o), and that of n-hexadecane ranged from 53 to 60(o).